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arXiv · 0802.3078

Tuneable Capacitor based on dual picks profile of the sacrificial layer

S. Soulimane·F. Casset·F. Chapuis·P. -L. Charvet·M. aïd
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Abstract

In this paper, we present a novel dual gap tuneable capacitor process based on the profile of the sacrificial layer. This profile involves a tri-layer photo-resist process with only one mask level. This realization is based on a special profile of the sacrificial layer designed by two picks. The mechanism of the sacrificial layer realisation is dependent on resist thickness, resist formulation (viscosity, type of polymer and/or solvent, additives...), design of the patterned layer (size or width) and the conditions under which this layer is prepared: thermal treatment, etch back processes... In this communication we demonstrate influence of the later parameters and discuss how a dual pick profile was achieved.

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S. Soulimane, F. Casset, F. Chapuis, P. -L. Charvet, M. aïd. 2008-02-21. Tuneable Capacitor based on dual picks profile of the sacrificial layer. https://arxiv.org/abs/0802.3078

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