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arXiv · 0805.0942

Micro-tensile tests on micromachined metal on polymer specimens: elasticity, plasticity and rupture

C. Seguineau·M. Ignat·C. Malhaire·S. Brida·X. Lafontan·J. -M. Desmarres·C. Josserond·L. Debove
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Abstract

This study is focused on the mechanical characterization of materials used in microelectronic and micro- electromechanical systems (MEMS) devices. In order to determine their mechanical parameters, a new deformation bench test with suitable micromachined specimens have been developed. Uniaxial tensile tests were performed on "low cost" specimens, consisting in electroplated thin copper films and structures, deposited on a polimide type substrate. Moreover, a cyclic mechanical actuation via piezoelectric actuators was tested on the same deformation bench. These experiments validate the device for performing dynamic characterization of materials, and reliability studies of different microstructures.

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C. Seguineau, M. Ignat, C. Malhaire, S. Brida, X. Lafontan, J. -M. Desmarres, C. Josserond, L. Debove. 2008-05-07. Micro-tensile tests on micromachined metal on polymer specimens: elasticity, plasticity and rupture. https://arxiv.org/abs/0805.0942

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