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arXiv · 0912.5129

Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma

Hongyu Wang·Wei Jiang·Zhenhua Bi·Younian Wang
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Abstract

We proposed an altered configuration for dual-frequency (DF) capacitively coupled plasmas (CCP). In this configuration, two pairs of electrodes are arranged oppositely, and the discharging is perpendicularly driven by two rf sources. With Particle-in-cell/Monte Carlo method, we have demonstrated this configuration can remove the harmful electromagnetic and DF coupling effects in conventional DF-CCP.

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Hongyu Wang, Wei Jiang, Zhenhua Bi, Younian Wang. 2009-12-28. Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma. https://arxiv.org/abs/0912.5129

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