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arXiv · 1110.6867

Effects of Lithographic Stitching Errors on the Performance of Waveguide Bragg Gratings

Steve Zamek·Mercedeh Khajavikhan·Dawn T. H. Tan·Maurice Ayache·Boris Slutsky·Yeshaiahu Fainman
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Abstract

We investigate the performance of waveguide Bragg gratings as a function of imperfections introduced in the fabrication process. Effects of stitching errors introduced in the electron-beam and UV-lithography are discussed in details.

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Steve Zamek, Mercedeh Khajavikhan, Dawn T. H. Tan, Maurice Ayache, Boris Slutsky, Yeshaiahu Fainman. 2011-10-31. Effects of Lithographic Stitching Errors on the Performance of Waveguide Bragg Gratings. https://arxiv.org/abs/1110.6867

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