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arXiv · 1111.3541

Etching suspended superconducting hybrid junctions from a multilayer

Hung Q. Nguyen·Laetitia Pascal·Z. H. Peng·Olivier Buisson·B. Gilles·Clemens Winkelmann·Hervé Courtois
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Abstract

A novel method to fabricate large-area superconducting hybrid tunnel junctions with a suspended central normal metal part is presented. The samples are fabricated by combining photo-lithography and chemical etch of a superconductor - insulator - normal metal multilayer. The process involves few fabrication steps, is reliable and produces extremely high-quality tunnel junctions. Under an appropriate voltage bias, a significant electronic cooling is demonstrated.

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Hung Q. Nguyen, Laetitia Pascal, Z. H. Peng, Olivier Buisson, B. Gilles, Clemens Winkelmann, Hervé Courtois. 2011-11-15. Etching suspended superconducting hybrid junctions from a multilayer. https://doi.org/10.1063/1.4729779

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