arXiv · 1408.3762
A new cantilever beam-rigid-body MEMS gyroscope: mathematical model and linear dynamics
Abstract
A new microbeam-rigid-body gyroscope is introduced and its static and dynamic behaviours are studied. The main structure includes a microbeam and an eccentric end-rigid-body influencing the dynamic and static characteristics of the sensor. The sensitivity of the device and the effect of system parameters on the microsystem's response are investigated.
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Seyed Amir Mousavi Lajimi, Glenn Heppler, Eihab Abdel-Rahman. 2014-08-16. A new cantilever beam-rigid-body MEMS gyroscope: mathematical model and linear dynamics. https://arxiv.org/abs/1408.3762
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