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arXiv · 1605.02692

Round Robin: Quantitative Lateral Resolution of PHI XPS microprobes Quantum 2000 / Quantera SXM

U. Scheithauer·M. Kolb·G. A. M. Kip·E. Naburgh·J. H. M. Snijders
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Abstract

The quantitative lateral resolution is a reliable measure for the quality of an XPS microprobe equipped with a focused X-ray beam. It describes the long tail contributions of the X-ray beam intensity distribution. The knowledge of these long tail contributions is essential when judging on the origin of signals of XPS spectra recorded on small-sized features. In this round robin test the quantitative lateral resolution of 7 PHI XPS microprobes has been estimated. As expected, the quantitative lateral resolution has significantly larger values than the nominal X-ray beam diameter. The estimated values of the quantitative lateral resolution follow a trend in time: The newer the monochromator of an XPS microprobe so much the better the quantitative lateral resolution.

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U. Scheithauer, M. Kolb, G. A. M. Kip, E. Naburgh, J. H. M. Snijders. 2016-05-09. Round Robin: Quantitative Lateral Resolution of PHI XPS microprobes Quantum 2000 / Quantera SXM. https://doi.org/10.1016/j.elspec.2016.04.007

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