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arXiv · 1712.03616

Dynamic metasurface lens based on MEMS Technology

Tapashree Roy·Shuyan Zhang·Il Woong Jung·Mariano Troccoli·Federico Capasso·Daniel Lopez
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Abstract

In the recent years, metasurfaces, being flat and lightweight, have been designed to replace bulky optical components with various functions. We demonstrate a monolithic Micro-Electro-Mechanical System (MEMS) integrated with a metasurface-based flat lens that focuses light in the mid-infrared spectrum. A two-dimensional scanning MEMS platform controls the angle of the lens along the two orthogonal axes (tip-tilt) by +-9 degrees, thus enabling dynamic beam steering. The device can compensate for off-axis incident light and thus correct for aberrations such as coma. We show that for low angular displacements, the integrated lens-on-MEMS system does not affect the mechanical performance of the MEMS actuators and preserves the focused beam profile as well as the measured full width at half maximum. We envision a new class of flat optical devices with active control provided by the combination of metasurfaces and MEMS for a wide range of applications, such as miniaturized MEMS-based microscope systems, LIDAR scanners, and projection systems.

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Tapashree Roy, Shuyan Zhang, Il Woong Jung, Mariano Troccoli, Federico Capasso, Daniel Lopez. 2017-12-11. Dynamic metasurface lens based on MEMS Technology. https://doi.org/10.1063/1.5018865

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