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arXiv · 1806.05396

Flow sensor based on the snap-through detection of a curved micromechanical beam

Yoav Kessler·Robert Ilic·Slava Krylov·Alex Liberzon
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Abstract

We report on a flow velocity measurement technique based on snap-through detection of an electrostatically actuated, bistable micromechanical beam. We show that induced elecro-thermal Joule heating and the convective air cooling change the beam curvature and consequently the critical snap-through voltage ($V_{ST}$). Using single crystal silicon beams, we demonstrate the snap-through voltage to flow velocity sensitivity of $dV_{\text{ST}}/du \approx0.13$ V s m$^{-1}$ with a power consumption of $\approx360\; \mu$W. Our experimental results were in accord with the reduced order, coupled, thermo-electro-mechanical model prediction. We anticipate that electrostatically induced snap-through in curved, micromechanical beams will open new directions for the design and implementation of downscaled flow sensors for autonomous applications and environmental sensors.

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Yoav Kessler, Robert Ilic, Slava Krylov, Alex Liberzon. 2018-06-14. Flow sensor based on the snap-through detection of a curved micromechanical beam. https://arxiv.org/abs/1806.05396

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