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arXiv · 1910.03454

Far-field Compound Super-resolution Lens for direct laser writing of arbitrary nano patterns and beyond

B. Yan·L. Yue·J. N. Monks·X. Yang·D. Xiong·C. Jiang·Z. Wang
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Abstract

A low-cost compound super-resolution lens, consisting of a Plano-Convex lens and a Microsphere lens (PCM), was proposed and demonstrated for subwavelength direct laser scanning writing application. The PCM lens can achieve a far-field super-resolution of ~λ/3.5 in air (~6 um away from lens) which surpasses resolution limit of existing commercial objective lenses and is the first of its kind. Arbitrary nano-patterns can now be directly fabricated on various substrates in a simpleand low-cost manner using developed PCM lens. The lens can also be used for other applications including nano-imaging and sensing as well in a confocal configuration. This work may lead to the development of next-generation low-cost direct laser nanofabrication machine and superresolution imaging nanoscope.

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B. Yan, L. Yue, J. N. Monks, X. Yang, D. Xiong, C. Jiang, Z. Wang. 2019-10-08. Far-field Compound Super-resolution Lens for direct laser writing of arbitrary nano patterns and beyond. https://doi.org/10.1364/ol.380574

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