Nanometric precision distance metrology via chip-scale soliton microcombs

Abstract

Laser interferometry serves a fundamental role in science and technology, assisting precision metrology and dimensional length measurement. During the past decade, laser frequency combs - a coherent optical-microwave frequency ruler over a broad spectral range with traceability to time-frequency standards - have contributed pivotal roles in laser dimensional metrology with ever-growing demands in measurement precision. Here we report spectrally-resolved laser dimensional metrology via a soliton frequency microcomb, with nanometric-scale precision. Spectral interferometry provides information on the optical time-of-flight signature, and the large free-spectral range and high-coherence of the microcomb enables tooth-resolved and high-visibility interferograms that can be directly readout with optical spectrum instrumentation. We employ a hybrid timing signal from comb-line homodyne interferometry and microcomb spectrally-resolved interferometry - all from the same spectral interferogram. Our combined soliton and homodyne architecture demonstrates a 3-nm repeatability achieved via homodyne interferometry, and over 1,000-seconds stability in the long-term precision metrology at the white noise limits.