arXiv · 2006.01537
NEG pumps: Sorption mechanisms and applications
Abstract
This paper reports the main physical and chemical properties of NEG materials, sorption mechanisms and use of NEG pumps from high to extreme high vacuums.
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P. Manini, E. Maccallini. 2020-06-02. NEG pumps: Sorption mechanisms and applications. https://arxiv.org/abs/2006.01537
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