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arXiv · 2008.10672

Determination of the sheet resistance of an infinite thin plate with five point contacts located at arbitrary positions

Krzysztof R. Szymański·Piotr A. Zaleski
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Abstract

In this paper, a five-probe method of sheet resistance measurement that is independent of probe positions is reported. The method is strict for an infinite homogeneous plane. It has potential applications as a sheet resistance standard based on planar molecular layers. The method can be used to measure the sheet resistance of layers covering objects with a spherical topology, particularly on micro- and nanometric scales, where it is difficult to control probe positioning.

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Krzysztof R. Szymański, Piotr A. Zaleski. 2020-08-24. Determination of the sheet resistance of an infinite thin plate with five point contacts located at arbitrary positions. https://doi.org/10.1016/j.measurement.2020.108360

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