Elastic constant of dielectric nano-thin films using three-layer resonance studied by picosecond ultrasonics

Abstract

Elastic constants and sound velocities of nm-order thin films are essential for designing acoustic filters. However, it is difficult to measure them for dielectric thin films. In this study, we use a three-layer structure where a dielectric nano-thin film is sandwiched between thicker metallic films to measure the longitudinal elastic constant of the dielectric film. We propose an efficiency function to estimate the optimal thicknesses of the components. We use Pt/NiO/Pt three-layer films for confirming our proposed method. The determined elastic constant of NiO deposited at room temperature is smaller than the bulk value by $\sim$40$\%$. However, it approaches the bulk value as the deposition temperature increases. We also reveal that uncertainty of the elastic constant of the Pt film insignificantly affects the accuracy of the determined elastic constant of NiO in this structure.