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arXiv · 2205.10537

Integrated Metasurfaces on Silicon Photonics for Emission Shaping and Holographic Projection

Ping-Yen Hsieh·Shun-Lin Fang·Yu-Siang Lin·Wen-Hsien Huang·Jia-Min Shieh·Peichen Yu·You-Chia Chang
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Abstract

The emerging applications of silicon photonics in free space, such as LiDARs and quantum photonics, urge versatile emission shaping beyond the capabilities of conventional grating couplers. A platform that offers arbitrary shaping of free-space emission while maintaining the CMOS compatibility and monolithic integration is in pressing need. Here we demonstrate a platform that integrates metasurfaces monolithically on silicon photonic integrated circuits. The metasurfaces consist of amorphous silicon nanopillars evanescently coupled to silicon waveguides. We demonstrate experimentally diffraction-limited beam focusing with a Strehl ratio of 0.82, where the focused spot can be switched between two positions. We also realize a meta-hologram experimentally that projects an image above the silicon photonic chip. This platform can add a highly versatile interface to the existing silicon photonic ecosystems for precise delivery of free-space emission.

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Ping-Yen Hsieh, Shun-Lin Fang, Yu-Siang Lin, Wen-Hsien Huang, Jia-Min Shieh, Peichen Yu, You-Chia Chang. 2022-05-21. Integrated Metasurfaces on Silicon Photonics for Emission Shaping and Holographic Projection. https://doi.org/10.1515/nanoph-2022-0344

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