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arXiv · 2209.13229

Realization of a wide steering end-fire facet optical phased array using silicon rich silicon nitride

Hani Nejadriahi·Prabhav Gaur·Karl Johnson·Steve Pappert·Yeshaiahu Fainman·Paul Yu
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Abstract

The design, fabrication, and characterization of a 16-element optical phased array (OPA) using a high index (n = 3.1) silicon rich silicon nitride (SRN) is demonstrated. We present one-dimensional beam steering with end-fire facet antennas over a wide steering range of >115{\deg} at a fixed wavelength of 1525 nm. A spot size of 0.11{\deg} has been measured at boresight, consistent with theory. We demonstrate SRN as a viable material choice for chip-scale OPA applications due to its high thermo-optic coefficient, high optical power handling capacity due to negligible two-photon absorption (TPA), wide transparency window, low propagation loss, and CMOS compatibility.

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Hani Nejadriahi, Prabhav Gaur, Karl Johnson, Steve Pappert, Yeshaiahu Fainman, Paul Yu. 2022-09-27. Realization of a wide steering end-fire facet optical phased array using silicon rich silicon nitride. https://doi.org/10.1364/ol.476819

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