Breakdown modes of capacitively coupled plasma I: transitions from glow discharge to multipactor

Abstract

In this work, a one-dimensional direct implicit particle-in-cell/Monte Carlo collision (PIC/MCC) code is used to study the capacitive discharge driven under 60 MHz rf power in the background gas of pure argon. The electron-induced secondary electron emission (ESEE) model suitable for SiO$_2$ electrode is taken into account. Several discharge modes are found in the transition region between the higher-pressure glow discharge and the abnormal multipactor discharge in this simulation. In a nerrow voltage range of hundreds of volts, the abnormal multipactor will transform to normal multipactor with the contining decrease of pressure. The characteristic of the three sustainale discharges are given and anaysed, and their fomation porcess are discussed. These new discharges have higher electron energy and electron flux at the boundary and are mainly sustained by higher electrode-induced SEE coefficient and high frequency. The appearence of the two multipactor modes in 60 MHz range might broaden the theory of gas discharge and expand the application of capacitive discharges.