Capacitive-Tuned SIW Evanescent-Mode Cavity for Resonant Microwave Plasma Jet

Abstract

This paper introduces a novel atmospheric pressure and frequency-tunable microwave plasma jet utilizing evanescent-mode cavity resonator technology. The design uses a substrate-integrated waveguide approach, where two PCB substrates are assembled to form the resonant microwave plasma jet structure. This configuration provides excellent matching performance across the tuning range and can generate power-efficient plasma jets with a minimal input power of just a few watts. The prototype's resonant frequency can be tuned from 2.94 GHz, with no tuning capacitor, to 2.66 GHz when a capacitor placed in parallel with a circular slot etched on the top PCB board varies up to 1.6 pF. A novel circuit model design approach for this prototype is presented, and close agreement between the measured performance of the fabricated prototype and the simulation results validates this model. The frequency tunability achieved is a critical feature for fine-tuning the plasma jet when fabricated by low-cost PCB manufacturing and for applications in which manipulating the plasma chemistry by varying the ignition frequency is essential.