Back-Scattering Suppression for Broad-Spectral High-Absorption Silicon Extended Area Blackbody

Abstract

The stability and emissivity of the online calibration blackbody used in high-precision infrared remote sensing detectors in extreme environments are the primary limiting factors for their measurement accuracy. Due to the limitations of microstructure size effects, traditional calibration extended area blackbody cannot achieve an optimal balance between emissivity and stability, thus hindering further improvement in infrared remote sensing accuracy. This work proposes a new method that utilize suppressing near-field backscattering to control far-field reflectance. Specifically, through simultaneously reducing backscattering intensity and the backscattering solid angle, the reflectance is significantly reduced to an extremely low limit, which is validated through numerical simulations. Additionally, by combining the femtosecond laser self-convergent processing technique, the spontaneous energy negative feedback mechanism during femtosecond laser processing is utilized to achieve the fabrication of a high emissivity, thermally stable, mechanically stable, and highly uniform extended area blackbody. The blackbody fabricated using this technique can be applied for online calibration in various extreme environments, significantly improving measurement accuracy and service life.