Spiral resonator referenced on-chip low noise microwave generation

Abstract

In recent years, miniaturization and integration of photonic microwave oscillators by optical frequency division approach have witnessed rapid progress. In this work, we report on-chip low phase noise photonic microwave generation based on a planar chip design. Dual lasers are co-locked to a silicon nitride spiral resonator and their relative phase noise is measured below the cavity thermal noise limit, resulting in record low on-chip relative optical phase noise. A broadband integrated electro-optic comb up to 3.43 THz (27 nm) bandwidth is utilized to divide down the relative phase noise of the spiral resonator referenced lasers to the microwave domain. All-around record-low phase noise is achieved for planar chip-based photonic microwave oscillators from 10 Hz to 10 kHz offsets. The planar chip design, high technology-readiness level, foundry-ready processing, combined with the exceptional phase noise performance for our work represent a major advance of integrated photonic microwave oscillators.