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arXiv · 2509.00600

Bimorph Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducer

Ziqian Yao·Vakhtang Chuluhadze·Zihuan Liu·Xiaoyu Niu·Tzu-Husan Hsu·Byeongjin Kim·Neal Hall·Ruochen Lu
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Abstract

This work demonstrates a prototype bi-layer piezoelectric micromachined ultrasonic transducer (PMUT) based on transferred periodically poled piezoelectric film (P3F) X-cut lithium niobate (LN). Opposite in-plane polarizations in the piezoelectric film stack are employed to enable efficient lateral field excitation of the flexural mode. Thanks to its high piezoelectric coefficient and low dielectric loss, the X-cut LN exhibits high figure of merits (FoMs) as both sensors and transducers. The fabricated PMUT demonstrates an out-of-plane mode near 1 MHz with an electromechanical coupling of 3.6\%. Laser Doppler vibrometry further validates the finite element analysis, showing a peak center displacement of 340 pm/V. These results establish bi-layer P3F LN PMUTs as a promising platform for compact and high-performance ultrasonic transducers. Future work will focus on theoretical analysis, modeling of the measured data, improving the design of the transducer topology, and mitigating feedthrough effects.

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Ziqian Yao, Vakhtang Chuluhadze, Zihuan Liu, Xiaoyu Niu, Tzu-Husan Hsu, Byeongjin Kim, Neal Hall, Ruochen Lu. 2025-09-10. Bimorph Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducer. https://arxiv.org/abs/2509.00600

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