Loss Mechanisms in Cryogenic Microwave Epitaxial AlN Resonators

Abstract

Epitaxial aluminum nitride (AlN) thin-film bulk acoustic resonators (FBARs) enable low loss filtering for future 6G systems. They also provide a compact approach for qubit sensing at cryogenic temperatures. However, these devices are rarely characterized systematically from room temperature to cryogenic temperatures, and the mechanisms that limit their cryogenic performance remain unclear. In this work, we study a 15.6 GHz epitaxial AlN FBAR from room temperature to cryogenic temperatures to identify losses from the AlN film and those introduced by the electrodes, anchors, and other device layers. Small signal RF measurements from 294 K down to 6.5 K show an increase in the raw Qmax from 363 to 1589. A temperature dependent model that includes phonon phonon scattering, thermoelastic damping, dielectric loss, electrical loss, and anchor loss helps explain the measured Q(T) trend and identifies a transition from the Landau Rumer to the Akhiezer regime near 270 K. The model indicates that acoustic energy leakage through the anchors limits Q at cryogenic temperatures, while electrical loss dominates at higher temperatures. These results point to two routes toward higher cryogenic Q: better acoustic isolation of the anchors and lower loss electrodes, including superconducting electrodes. Improved anchor design benefits both high frequency 6G filters and cryogenic quantum microwave circuits, while superconducting electrodes are particularly useful for cryogenic operation.