Non-invasive monitoring of process-relevant plasma parameters by Fiber PROES in capacitively coupled Ar/CF$_4$ plasmas

Abstract

Monitoring changes of process-relevant plasma parameters, such as the electron density and ion flux to the wafer, is essential for the development and control of plasma processes. However, invasive plasma diagnostics, such as probe measurements, typically cannot be applied to commercial reactors. At the example of a low pressure capacitive radio frequency discharge operated in different mixtures of CF$_4$ and Ar, we demonstrate that changes of such plasma parameters can be monitored non-invasively by phase resolved optical emission spectroscopy via optical fibers (Fiber PROES), for which the ports are usually available at industrial plasma sources. In this way, the spatio-temporally resolved dynamics of energetic electrons are tracked by observing a selected emission line. By measuring the electron density and ion flux directly via probe and retarding field energy analyzer diagnostics as a function of driving voltage and pressure, changes of these plasma parameters, including hysteresis effects, are found to be correlated with transitions of the electron power absorption mode revealed by Fiber PROES. Such mode transitions cause the electron energy distribution function (EEDF) to change and, thus, affect such plasma parameters. Based on these findings, Fiber PROES can be used as a non-invasive diagnostic for the monitoring and knowledge-based development of plasma processes.