Low-Temperature Co-Fired Ceramics for a Sustainable Planar Plasma Jet with Homogeneous Plasma in Large Treatment Areas for Biomedical Applications

Abstract

This study presents a portable planar argon-based plasma jet designed for large-area biomedical applications, with an emphasis on uniform discharge, stability, and safety. The device incorporates interchangeable rear and side inlet gas adapters with restriction plates and channels to equalize gas flow, while electrodes are encapsulated in low-temperature co-fired ceramics to reduce degradation and arcing during repeated operation. Flow simulations were conducted for multiple channel configurations to ensure laminar gas distribution and uniform plasma generation. Device performance and safety were evaluated using the kinPen MED as a reference standard. Electrical characteristics, optical emission, discharge uniformity, temperature, gas velocity, ozone generation, UV irradiance, and leakage current were systematically measured. The plasma exhibited stable voltage, current, and power after an initial warm-up period. Temperatures stabilized within minutes, with the rear-inlet configuration demonstrating lower operating temperatures due to higher outlet gas velocity. Ozone levels remained below established safety limits, while UV exposure constrained allowable treatment times. Leakage current decreased with increasing distance and approached safety thresholds at short separations. These results demonstrate that the proposed planar plasma jet provides stable, uniform plasma delivery while meeting key safety requirements, supporting its potential for clinical and biomedical use.