Phase Transitions in a Dusty Plasma with Two Distinct Particle Sizes

Abstract

In semiconductor manufacturing, contamination due to particulates significantly decreases the yield and quality of device fabrication, therefore increasing the cost of production. Dust particle clouds can be found in almost all plasma processing environments including both plasma etching devices and in plasma deposition processes. Dust particles suspended within such plasmas will acquire an electric charge from collisions with free electrons in the plasma. If the ratio of inter-particle potential energy to the average kinetic energy is sufficient, the particles will form either a liquid structure with short range ordering or a crystalline structure with long range ordering. Otherwise, the dust particle system will remain in a gaseous state. Many experiments have been conducted over the past decade on such colloidal plasmas to discover the character of the systems formed, but more work is needed to fully understand these structures. The preponderance of previous experiments used monodisperse spheres to form complex plasma systems.