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Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems

K. L. Ekinci·Y. T. Yang·M. L. Roukes
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Abstract

Nanomechanical resonators can now be realized that achieve fundamental resonance frequencies exceeding 1 GHz, with quality factors (Q) in the range 1,000 - 100,000. The minuscule active masses of these devices, in conjunction with their high Qs, translate into unprecedented inertial mass sensitivities. This makes them natural candidates for a variety of mass sensing applications. Here we evaluate the ultimate mass sensitivity limits for nanomechanical resonators operating in vacuo, which are imposed by a number of fundamental physical noise processes. Our analyses indicate that nanomechanical resonators offer immense potential for mass sensing - ultimately with resolution at the level of individual molecules.

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K. L. Ekinci, Y. T. Yang, M. L. Roukes. 2003-09-16. Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems. https://doi.org/10.1063/1.1642738

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