Review of MEMS Transducers for Audio Applications
Microelectromechanical systems (MEMS) speakers are compact, scalable alternatives to traditional voice coil speakers, promising improved sound quality through precise semiconductor manufacturing. This review provides an overview of the research landscape, covering baseband-displacement, ultrasound-based, and thermoacoustic sound generation concepts, classifying MEMS speakers by their actuation principles as electrodynamic, piezoelectric, or electrostatic devices. A comparative analysis of performance indicators from 1990 to 2026 highlights the dominance of piezoelectric MEMS with baseband displacement, focusing on miniaturization and efficiency. The review outlines upcoming research challenges and identifies potential candidates for achieving full-spectrum audio performance. A focus on innovative approaches could lead to widespread adoption of MEMS-only speakers.