@misc{indiciaeb14a91d1c493,
  title = {A Unified Physics-Aware Quantum Machine Learning Framework across Power GaN HEMTs and Logic Nanowire FETs: Predicting Unseen Process Splits and Held-Out Geometry Combinations with Lower Error and Tighter Split-to-Split Variability},
  author = {Rushat Rai and Yun-Yuan Wang and Autsada Kakaen and Pei-Jie Chang and Doan Viet Nguyen and Yuan-Chieh Chiu and Doldet Tantraviwat and Niall Tumilty and Simon See and Wen-Jay Lee and Tai-Yue Li and Nan-Yow Chen and Tian-Li Wu},
  year = {2026},
  url = {https://arxiv.org/abs/2609.05251},
  note = {Source identifier: 2609.05251}
}