TY  - RPRT
TI  - A Unified Physics-Aware Quantum Machine Learning Framework across Power GaN HEMTs and Logic Nanowire FETs: Predicting Unseen Process Splits and Held-Out Geometry Combinations with Lower Error and Tighter Split-to-Split Variability
AU  - Rushat Rai
AU  - Yun-Yuan Wang
AU  - Autsada Kakaen
AU  - Pei-Jie Chang
AU  - Doan Viet Nguyen
AU  - Yuan-Chieh Chiu
AU  - Doldet Tantraviwat
AU  - Niall Tumilty
AU  - Simon See
AU  - Wen-Jay Lee
AU  - Tai-Yue Li
AU  - Nan-Yow Chen
AU  - Tian-Li Wu
PY  - 2026
UR  - https://arxiv.org/abs/2609.05251
ID  - 2609.05251
ER  -