@misc{indiciaec6e6e891bbc8,
  title = {Image resolution enhancement for advanced semiconductor nodes},
  author = {Lucas Rencker and Omid Tajalizadehkhoob and Khalid Elsayed and Artem Khachaturiants and Helda Pahlavani and Yan Guo and Jakob van de Laar and Erik Simons and Niranjan Saikumar and Hamed Sadeghian},
  year = {2026},
  doi = {10.1117/12.3011239},
  url = {https://arxiv.org/abs/2610.05809},
  note = {Source identifier: 2610.05809}
}