TY  - RPRT
TI  - Energy-dependent trapping of backscattered helium during magnetron sputtering growth: A molecular dynamics study
AU  - Pascal Brault
AU  - Anne-Lise Thomann
AU  - Alejandro Borroto
PY  - 2026
UR  - https://arxiv.org/abs/2610.13509
ID  - 2610.13509
ER  -