@misc{indiciaeee1ae147f46c, title = {Uncertainty-aware Feedback Loop Diagnosis: integrating reinforcement learning and conformal prediction for reliable wafer defect classification}, author = {Aleksandr Dekhovich and Carlas Smith and Oleg Soloviev}, year = {2026}, url = {https://arxiv.org/abs/2610.40421}, note = {Source identifier: 2610.40421} }