TY  - RPRT
TI  - Uncertainty-aware Feedback Loop Diagnosis: integrating reinforcement learning and conformal prediction for reliable wafer defect classification
AU  - Aleksandr Dekhovich
AU  - Carlas Smith
AU  - Oleg Soloviev
PY  - 2026
UR  - https://arxiv.org/abs/2610.40421
ID  - 2610.40421
ER  -