@misc{indiciae7d41b2e91c68, title = {Atomistic Insights into MOCVD Growth of GaAs using a Closed Loop Autonomous System Combining Directed Reinforcement Learning and Kinetic Monte Carlo Simulations}, author = {Hrishi V. Harsora and Ashutosh Krishna Amaram and Raghavan Ranganathan and Tarun K. Agarwal}, year = {2026}, url = {https://arxiv.org/abs/2611.01646}, note = {Source identifier: 2611.01646} }