@misc{indiciae849d41165f6a, title = {Nondestructive 3D Metrology of Through-Glass Via Geometry and Internal Wall Texture Using Holotomography}, author = {Dohyeon Lee and Herve Hugonnet and YongKeun Park}, year = {2026}, url = {https://arxiv.org/abs/2611.02225}, note = {Source identifier: 2611.02225} }