@misc{indiciaee45b426c74e9,
  title = {Surface chemistry as data for level-set simulation of etching and deposition},
  author = {Lado Filipovic and Tobias Reiter and Philipp Haslhofer},
  year = {2026},
  url = {https://arxiv.org/abs/2611.03707},
  note = {Source identifier: 2611.03707}
}