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arXiv · 1002.4071

Electrically Detected Magnetic Resonance Applied to the Study of Near Surface Electron Donors in Silicon

W. D. Hutchison·P. G. Spizzirri·F. Hoehne·M. S. Brandt
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Abstract

Electrically detected magnetic resonance (EDMR) is applied to mm size devices with implanted leads and a 50 micron square gap laid down on bulk phosphorus doped silicon. Devices with a range of phosphorus concentrations and surface types were prepared and measured to examine the interplay between donor and charge trap states in producing EDMR signals.

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W. D. Hutchison, P. G. Spizzirri, F. Hoehne, M. S. Brandt. 2010-02-22. Electrically Detected Magnetic Resonance Applied to the Study of Near Surface Electron Donors in Silicon. https://arxiv.org/abs/1002.4071

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