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arXiv · 1003.4859

Deposition of La2Zr2O7 Film by Chemical Solution Deposition

Z. M. Yu·Philippe Odier·S. Morlens·P. Chaudouet·Maria Bacia·L. Zhou·P. X. Zhang·L. H. Jin·C. S. Li·David Philippe·Olivier Fruchart·Y. F. Lu
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Abstract

La2Zr2O7 (LZO) formation of bulk powders and of films by Chemical Solution Deposition (CSD) process have been studied using propionates. The treatment involved a one step cycle in the reducing forming gas (Ar-5%H2) to be compatible with Ni-5at%W RABITS. Large amount of residual carbon was found in LZO powders formed in these conditions (10 wt %). The volume fraction of the cube texture in LZO films on Ni-5at%w RABITS was found to be a function of the speed of the gas flown above sample. This phenomenon is discussed in considering the C deposited from the carbon-containing gases emitted during the pyrolysis of the precursor. Using proper conditions (950 ^\circC and the speed of gas of 6.8\times10^{-2} m/s), LZO films with good surface crystallinity could be obtained on Ni-5at%W RABITS as demonstrated by X-ray diffraction, electron backscattered diffraction and RHEED. The existence of residual carbon in oxide films is a common question to films deposited by CSD processes under reducing condition.

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Z. M. Yu, Philippe Odier, S. Morlens, P. Chaudouet, Maria Bacia, L. Zhou, P. X. Zhang, L. H. Jin, C. S. Li, David Philippe, Olivier Fruchart, Y. F. Lu. 2010-03-25. Deposition of La2Zr2O7 Film by Chemical Solution Deposition. https://doi.org/10.1007/s10971-010-2204-y

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