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arXiv · 1008.4534

Possibilities of application of elastic mid-IR light scattering for inspection of internal gettering operations

O. V. Astafiev·A. N. Buzynin·V. P. Kalinushkin·D. I. Murin·V. A. Yuryev
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Abstract

A method of low-angle mid-IR light scattering is shown to be applicable for the contactless and non-destructive inspection of the internal gettering process in CZ Si crystals. A classifcation of scattering inhomogeneities in initial crystals and crystals subjected to the getting process is presented.

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O. V. Astafiev, A. N. Buzynin, V. P. Kalinushkin, D. I. Murin, V. A. Yuryev. 2010-08-30. Possibilities of application of elastic mid-IR light scattering for inspection of internal gettering operations. https://arxiv.org/abs/1008.4534

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