"Actuation at a distance" of microelectromechanical systems using photoelectrowetting: proof-of-concept

Matthieu Gaudet; Steve Arscott

doi:10.1063/1.4723569

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arXiv · 1201.2873

"Actuation at a distance" of microelectromechanical systems using photoelectrowetting: proof-of-concept

Matthieu Gaudet·Steve Arscott

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Abstract

We demonstrate here a proof-of-concept experiment that microelectromechanical systems (MEMS) can be actuated using photoelectrowetting. In order to demonstrate this, a 30 \mu m thick aluminum cantilever is actuated using an ordinary white light source. A deflection of 56 \mu m is observed using a light irradiance equal to \approx 1000 W m-2 at a bias of 7 V. The deflection of the cantilever relies on the recently observed photoelectrowetting effect [Sci. Rep.1, 184 (2011)]. Such "actuation at a distance" could be useful for optical addressing and control of autonomous wireless sensors, MEMS and microsystems.

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Matthieu Gaudet, Steve Arscott. 2012-01-13. "Actuation at a distance" of microelectromechanical systems using photoelectrowetting: proof-of-concept. https://doi.org/10.1063/1.4723569

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