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arXiv · 1210.0125

Fabrication of thin diamond membranes for photonic applications

Jonathan C. Lee·Andrew P. Magyar·David O. Bracher·Igor Aharonovich·Evelyn L. Hu
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Abstract

High quality, thin diamond membranes containing nitrogen-vacancy centers provide critical advantages in the fabrication of diamond-based structures for a variety of applications, including wide field magnetometry, photonics and bio-sensing. In this work we describe, in detail, the generation of thin, optically-active diamond membranes by means of ion implantation and overgrowth. To establish the suitability of our method for photonic applications, photonic crystal cavities with quality factor of 1000 are fabricated.

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Jonathan C. Lee, Andrew P. Magyar, David O. Bracher, Igor Aharonovich, Evelyn L. Hu. 2012-09-29. Fabrication of thin diamond membranes for photonic applications. https://arxiv.org/abs/1210.0125

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