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arXiv · 1402.3117

Colloidal pattern replication through contact photolithography operated in a "Talbot-Fabry-Perot" regime

Aline Emplit·Jian Xiang Lian·Isabelle Huynen·Alexandru Vlad·Michael Sarrazin
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Abstract

We detail on a continuous colloidal pattern replication by using contact photolithography. Chrome on quartz masks are fabricated using colloidal nanosphere lithography and subsequently used as photolithography stamps. Hexagonal pattern arrangements with different dimensions (980, 620 and 480 nm, using colloidal particles with respective diameters) have been studied. When the mask and the imaged resist layer were in intimate contact, a high fidelity pattern replica was obtained after photolithography exposure and processing. In turn, the presence of an air-gap in between has been found to affect the projected image onto the photoresist layer, strongly dependent on the mask feature size and air-gap height. Pattern replication, inversion and hybridization was achieved for 980 nm-period mask; no hybridization for the 620 nm; and only pattern replication for the 480 nm. These results are interpreted in the framework of a "Talbot-Fabry-Perot" effect. Numerical simulations corroborate with the experimental findings providing insight into the involved processes highlighting the important parameters affecting the exposure pattern. The approach allows complex subwavelength patterning and is relevant for a 3D layer-by-layer printing.

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Aline Emplit, Jian Xiang Lian, Isabelle Huynen, Alexandru Vlad, Michael Sarrazin. 2014-02-13. Colloidal pattern replication through contact photolithography operated in a "Talbot-Fabry-Perot" regime. https://doi.org/10.1088/0957-4484%2F25%2F14%2F145303

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