Characterization of TiAlSiON Coatings Deposited by Plasma Enhanced Magnetron Sputtering: XRD, XPS, and DFT Studies

A. S. Kamenetskih; A. I. Kukharenko; E. Z. Kurmaev; N. A. Skorikov; N. V. Gavrilov; S. O. Cholakh; A. V. Chukin; V. M. Zainullina; M. A. Korotin

arXiv · 1411.3859

Characterization of TiAlSiON Coatings Deposited by Plasma Enhanced Magnetron Sputtering: XRD, XPS, and DFT Studies

A. S. Kamenetskih·A. I. Kukharenko·E. Z. Kurmaev·N. A. Skorikov·N. V. Gavrilov·S. O. Cholakh·A. V. Chukin·V. M. Zainullina·M. A. Korotin

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Abstract

The results of characterization of TiAlSiON hard coatings deposited on ferric-chromium AISI 430 stainless steel by plasma enhanced magnetron sputtering are presented. The coating with maximum hardness (of 45 GPa) was obtained at the following optimal values of elemental concentrations: Si ~5 at.%, Al ~15 at.%, and Ti ~27 at.%. The elastic modulus of the coating was 590 GPa. The reading of gaseous mixture (Ar-N2) pressure was 1*10-3 Torr and the reading of partial pressure of oxygen (O2) was 1*10-5 Torr. The X-ray diffraction (XRD) measurements showed the presence of Ti(Al)N. High-energy resolved XPS spectra of core levels revealed the formation of Ti-N, Ti-O-N, Si-N and Al-O-N bonds. Comparison of XPS valence band spectra with specially performed density functional theory calculations for two ordered and few disordered TiN1-xOx (0 =< x <= 1) demonstrates that a Ti(Al)OxNy phase is formed on the surface of AISI430 steel upon the plasma enhanced magnetron sputtering, which provides this material with a good combination of high hardness and improved oxidation resistance.

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A. S. Kamenetskih, A. I. Kukharenko, E. Z. Kurmaev, N. A. Skorikov, N. V. Gavrilov, S. O. Cholakh, A. V. Chukin, V. M. Zainullina, M. A. Korotin. 2014-11-14. Characterization of TiAlSiON Coatings Deposited by Plasma Enhanced Magnetron Sputtering: XRD, XPS, and DFT Studies. https://arxiv.org/abs/1411.3859

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