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arXiv · 1808.05061

Femtosecond laser crystallization of amorphous titanium oxide thin films

Jan S. Hoppius·Danny Bialuschewski·Sanjay Mathur·Andreas Ostendorf·Evgeny L. Gurevich
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Abstract

In this paper we demonstrate experimentally that crystalline phases appear in amorphous titanium oxide upon processing with ultrafast laser pulses. Amorphous titanium thin films were produced by plasma-enhanced chemical vapor deposition (PECVD) and exposed to femtosecond laser pulses. Formation of rutile phase was confirmed by X-ray diffraction, Raman measurements and electron backscattering diffraction. A rang of processing parameters for the crystallization is reported and possible background mechanisms are discussed.

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Jan S. Hoppius, Danny Bialuschewski, Sanjay Mathur, Andreas Ostendorf, Evgeny L. Gurevich. 2018-08-15. Femtosecond laser crystallization of amorphous titanium oxide thin films. https://doi.org/10.1063/1.5027899

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