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arXiv · 2201.06258

Ultra-compact Si/In$_2$O$_3$ hybrid plasmonic waveguide modulator with a high bandwidth beyond 40 GHz

Yishu Huang·Jun Zheng·Bingcheng Pan·Lijia Song·Guanan Chen·Zejie Yu·Hui Ye·Daoxin Dai
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Abstract

Optical modulators are required to have high modulation bandwidths and a compact footprint. In this paper we experimentally demonstrate a novel Si/In$_2$O$_3$ hybrid plasmonic waveguide modulator, which is realized by an asymmetric directional coupler (ADC) consisting of a silicon photonic waveguide and a Si/In$_2$O$_3$ hybrid plasmonic waveguide. The optical signal is modulated by radio-frequency (RF) signal applied on the Au electrodes at the top of MOS capacitor and contacting the In$_2$O$_3$ thin film. The record-high modulation bandwidth of >40 GHz is realized by a silicon-doping-free metal-oxide-In$_2$O$_3$ capacitor integrated in a 3.5-$\mu$m-long asymmetric directional coupler (ADC) for the first time.

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Yishu Huang, Jun Zheng, Bingcheng Pan, Lijia Song, Guanan Chen, Zejie Yu, Hui Ye, Daoxin Dai. 2022-01-17. Ultra-compact Si/In$_2$O$_3$ hybrid plasmonic waveguide modulator with a high bandwidth beyond 40 GHz. https://arxiv.org/abs/2201.06258

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