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arXiv · 2212.05026

Interlayer-engineered local epitaxial templating induced enhancement in polarization (2P$_r$ > 70$μ$C/cm$^2$) in Hf$_{0.5}$Zr$_{0.5}$O$_2$ thin films

Srinu Rowtu·Paritosh Meihar·Adityanarayan Pandey·Md. Hanif Ali·Sandip Lashkare·Udayan Ganguly
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Abstract

In this work, we report a high remnant polarization, 2Pr >70$μ$C/cm$^2$ in thermally processed atomic layer deposited Hf0.5Zr0.5O2 (HZO) film on Silicon with NH3 plasma exposed thin TiN interlayer and Tungsten (W) as a top electrode. The effect of interlayer on the ferroelectric properties of HZO is compared with standard Metal-Ferroelectric-Metal and Metal-Ferroelectric-Semiconductor structures. X-Ray Diffraction shows that the Orthorhombic (o) phase increases as TiN is thinned. However, the strain in the o-phase is highest at 2 nm TiN and then relaxes significantly for the no-TiN case. HRTEM images reveal that the ultra-thin TiN acts as a seed layer for the local epitaxy in HZO potentially increasing the strain to produce a 2X improvement in the remnant polarization. Finally, the HZO devices are shown to be wake-up-free, and exhibit endurance >10^6 cycles. This study opens a pathway to achieve epitaxial ferroelectric HZO films on Si with improved memory performance.

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Srinu Rowtu, Paritosh Meihar, Adityanarayan Pandey, Md. Hanif Ali, Sandip Lashkare, Udayan Ganguly. 2023-06-01. Interlayer-engineered local epitaxial templating induced enhancement in polarization (2P$_r$ > 70$μ$C/cm$^2$) in Hf$_{0.5}$Zr$_{0.5}$O$_2$ thin films. https://doi.org/10.1109/ted.2023.3277804

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