Patterning of Fine Features on Material Surfaces Using a Ga Ion-Beam in a FIB-SEM

Abstract

Since an ion-beam is a viable attractive alternative to other material surface patterning techniques like an electron-beam, a study of the structure, composition and dimension of patterned lines created on surfaces of Si and SrTiO3 wafers with a Ga ion-beam was carried out. A combination of top-view SEM and cross-sectional STEM imaging and EDX spectroscopy applied to the patterned lines showed that the total ion-dose (DI) is the key parameter affecting the characteristics of the patterned lines, which can be adjusted by the degree of overlap between adjacent spots, beam dwell time at each spot, and the number of beam-passes for every beam size and current. A strong dependence between the used ion-doses and the patterned lines sizes was observed and quantified. At higher ion-doses (DI > 10^15 ions/cm^2), the Ga ions remove part of the material in the exposed area creating channels surrounded with amorphized regions whereas, at lower ion-doses only amorphization occurs, creating a ridge on the wafer surface. Further, to pattern lines with similar sizes, an order of magnitude different ion-doses might be required in different materials as was the case with Si and SrTiO3. The quantification of line sizes showed that with this approach, lines as fine as 10 nm can be reproducibly patterned and characterized on the surfaces of materials, when low ion-doses are used, typically in the range of 10^14-10^15 ions/cm^2.