Beware of the water: Hidden hydrogenation of perovskite membranes made by the water-soluble sacrificial layer method

Abstract

The fabrication of perovskite oxide free-standing films (membranes) by lift-off methods using water-soluble sacrificial layers is appealing because of the new mechanical degrees of freedom that these membranes present over conventional epitaxial films. However, little is known about how their fabrication process, and in particular the exposure to water during the etching step, affects their properties. Here, we investigate how membranes of two perovskite archetypes, antiferroelectric PbZrO3 and paraelectric SrTiO3, are affected by water-based etching step. Using Raman spectroscopy and X-ray diffraction, we find evidence that hydrogen penetrates the perovskite structure. Concomitant with this protonation, the functional properties also change, and both materials display ferroelectric-like behavior that is absent in bulk ceramics or hydrogen-free films at room temperature. We also find that thermal annealing can be used to expel the hydrogen from the membranes, which henceforth recover bulk-like properties. The two main conclusions of this work are that (i) any perovskite membrane made by sacrificial layer hydrolysis is vulnerable to hydrogen penetration (protonation) that can induce important but extrinsic changes in functional properties, and (ii) the hydrogen can, and should, be expelled by annealing to recover intrinsic behaviour.