On the origin of the E1 electron trap level in GaN and dilute AlxGa1-xN films

Abstract

The results of high-resolution Laplace deep-level transient spectroscopy (L-DLTS) measurements applied to the E1 and FeGa electron traps in dilute AlxGa1-xN films (x = 0.063), grown by metal-organic vapor phase epitaxy (MOVPE) on Ammono-GaN substrates, are presented. It is shown that the electron emission signals associated with the E1 donor and the FeGa acceptor levels split into individual components due to the aluminium fluctuations in the nearest neighbour shells around the E1 and FeGa defects. The splitting patterns observed in the L-DLTS spectra are nearly identical for both signals. Furthermore, the ratios of peak magnitudes determined from the L-DLTS analysis for both the E1 and E3 traps are consistent with calculated probabilities of finding a given number of aluminium atoms in the second nearest neighbour shell around a Ga lattice site in AlxGa1-xN with x = 0.063. These findings provide strong evidence that both the E1 and the FeGa trap states in dilute AlxGa1-xN are related to defects located in the Ga sublattice. To elucidate the origin of the E1 trap in AlxGa1-xN, we have performed a comprehensive scan of possible impurities and defects in GaN and AlxGa1-xN using hybrid density functional calculations of transition levels and their associated shifts upon substitution of Ga neighbour atoms by Al. From analysis of the results, we find that the E1 electron trap in GaN and AlxGa1-xN is most likely related to a donor transition from a carbon or molybdenum impurity atom at the gallium site, respectively.