Direct-write electrochemical nanofabrication of ultrasmall graphene devices

Abstract

Graphene nano-ribbons, GNRs, are promising channel materials for next-generation ultra-miniaturised devices due to their exceptional electrical and thermal properties which arise from their atomic thickness, as well as their ability to have a size-dependent band-gap [1-9]. However, despite extensive efforts to reliably fabricate narrow GNR-based field-effect transistors [10-12], their integration into conventional transistor technologies remains hindered by challenges such as high fabrication costs and complex processing requirements [13, 14]. In this study, we present a direct-write, relatively low-cost and robust approach for fabricating sub-10 nm GNR-based FETs using electrochemical atomic force microscopy lithography with an alternating current (AC) bias, obviating the need for electrodes. We also explain the underlying electrochemical process and provide a model which can be used to describe it. Leveraging the high-precision positioning capability of AFM, this method enables precise nanoscale graphene patterning with feature sizes below 10nm. Compared with conventional lithographic techniques, photo- and electron-beam lithography i.e., PL & EBL, respectively [2, 15-20], it offers higher resolution, lower defect density, contamination-free processing, and the capability for in situ nanoscale device modification and characterisation. This work provides an efficient strategy for advancing GNR-based nanoelectronics.